Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors

Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors

10.1109/LED.2008.923710

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Bibliographic Details
Main Authors: Tan, K.-M., Fang, W.-W., Yang, M., Liow, T.-Y., Lee, R.T.-P., Balasubramanian, N., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Contact etch stop layer (CESL)
Diamond-like carbon (DLC)
FinFET
Multiple-gate
Strain
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55632
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Institution: National University of Singapore
Description
Summary:10.1109/LED.2008.923710

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