Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors

10.1109/LED.2008.923710

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Bibliographic Details
Main Authors:	Tan, K.-M., Fang, W.-W., Yang, M., Liow, T.-Y., Lee, R.T.-P., Balasubramanian, N., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Contact etch stop layer (CESL) Diamond-like carbon (DLC) FinFET Multiple-gate Strain
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55632
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55632
record_format	dspace
spelling	sg-nus-scholar.10635-556322023-10-29T22:46:00Z Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors Tan, K.-M. Fang, W.-W. Yang, M. Liow, T.-Y. Lee, R.T.-P. Balasubramanian, N. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Contact etch stop layer (CESL) Diamond-like carbon (DLC) FinFET Multiple-gate Strain 10.1109/LED.2008.923710 IEEE Electron Device Letters 29 7 750-752 EDLED 2014-06-17T02:45:20Z 2014-06-17T02:45:20Z 2008-07 Article Tan, K.-M., Fang, W.-W., Yang, M., Liow, T.-Y., Lee, R.T.-P., Balasubramanian, N., Yeo, Y.-C. (2008-07). Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors. IEEE Electron Device Letters 29 (7) : 750-752. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2008.923710 07413106 http://scholarbank.nus.edu.sg/handle/10635/55632 000257626000030 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Contact etch stop layer (CESL) Diamond-like carbon (DLC) FinFET Multiple-gate Strain
spellingShingle	Contact etch stop layer (CESL) Diamond-like carbon (DLC) FinFET Multiple-gate Strain Tan, K.-M. Fang, W.-W. Yang, M. Liow, T.-Y. Lee, R.T.-P. Balasubramanian, N. Yeo, Y.-C. Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors
description	10.1109/LED.2008.923710
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, K.-M. Fang, W.-W. Yang, M. Liow, T.-Y. Lee, R.T.-P. Balasubramanian, N. Yeo, Y.-C.
format	Article
author	Tan, K.-M. Fang, W.-W. Yang, M. Liow, T.-Y. Lee, R.T.-P. Balasubramanian, N. Yeo, Y.-C.
author_sort	Tan, K.-M.
title	Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors
title_short	Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors
title_full	Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors
title_fullStr	Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors
title_full_unstemmed	Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors
title_sort	diamond-like carbon (dlc) liner: a new stressor for p-channel multiple-gate field-effect transistors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55632
_version_	1781412162737012736

Diamond-like carbon (DLC) liner: A new stressor for P-channel multiple-gate field-effect transistors

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