Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples

Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples

10.1016/j.ultramic.2004.06.002

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Bibliographic Details
Main Authors: Wong, W.K., Rau, E.I., Thong, J.T.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Capacitive-coupling
EBIC
Electron-acoustic
SEAM
SEBIV
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55854
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Institution: National University of Singapore
Description
Summary:10.1016/j.ultramic.2004.06.002

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