Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples

Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples

10.1016/j.ultramic.2004.06.002

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Bibliographic Details
Main Authors: Wong, W.K., Rau, E.I., Thong, J.T.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Capacitive-coupling
EBIC
Electron-acoustic
SEAM
SEBIV
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55854
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-558542023-10-26T07:35:44Z Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples Wong, W.K. Rau, E.I. Thong, J.T.L. ELECTRICAL & COMPUTER ENGINEERING Capacitive-coupling EBIC Electron-acoustic SEAM SEBIV 10.1016/j.ultramic.2004.06.002 Ultramicroscopy 101 2-4 183-195 ULTRD 2014-06-17T02:47:52Z 2014-06-17T02:47:52Z 2004-11 Article Wong, W.K., Rau, E.I., Thong, J.T.L. (2004-11). Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples. Ultramicroscopy 101 (2-4) : 183-195. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ultramic.2004.06.002 03043991 http://scholarbank.nus.edu.sg/handle/10635/55854 000224046100014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Capacitive-coupling
EBIC
Electron-acoustic
SEAM
SEBIV
spellingShingle Capacitive-coupling
EBIC
Electron-acoustic
SEAM
SEBIV
Wong, W.K.
Rau, E.I.
Thong, J.T.L.
Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
description 10.1016/j.ultramic.2004.06.002
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Wong, W.K.
Rau, E.I.
Thong, J.T.L.
format Article
author Wong, W.K.
Rau, E.I.
Thong, J.T.L.
author_sort Wong, W.K.
title Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
title_short Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
title_full Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
title_fullStr Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
title_full_unstemmed Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
title_sort electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55854
_version_ 1781412200072609792

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