Equipment design and control of advanced thermal-processing module in lithography
10.1109/TIE.2009.2026230
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sg-nus-scholar.10635-559042023-10-27T07:02:57Z Equipment design and control of advanced thermal-processing module in lithography Tay, A. Chua, H.T. Wang, Y. Ngo, Y.S. ELECTRICAL & COMPUTER ENGINEERING Lithography Temperature control Thermal cycling Thermoelectric 10.1109/TIE.2009.2026230 IEEE Transactions on Industrial Electronics 57 3 1112-1119 ITIED 2014-06-17T02:48:27Z 2014-06-17T02:48:27Z 2010-03 Article Tay, A., Chua, H.T., Wang, Y., Ngo, Y.S. (2010-03). Equipment design and control of advanced thermal-processing module in lithography. IEEE Transactions on Industrial Electronics 57 (3) : 1112-1119. ScholarBank@NUS Repository. https://doi.org/10.1109/TIE.2009.2026230 02780046 http://scholarbank.nus.edu.sg/handle/10635/55904 000274391300037 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| topic |
Lithography Temperature control Thermal cycling Thermoelectric |
| spellingShingle |
Lithography Temperature control Thermal cycling Thermoelectric Tay, A. Chua, H.T. Wang, Y. Ngo, Y.S. Equipment design and control of advanced thermal-processing module in lithography |
| description |
10.1109/TIE.2009.2026230 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Chua, H.T. Wang, Y. Ngo, Y.S. |
| format |
Article |
| author |
Tay, A. Chua, H.T. Wang, Y. Ngo, Y.S. |
| author_sort |
Tay, A. |
| title |
Equipment design and control of advanced thermal-processing module in lithography |
| title_short |
Equipment design and control of advanced thermal-processing module in lithography |
| title_full |
Equipment design and control of advanced thermal-processing module in lithography |
| title_fullStr |
Equipment design and control of advanced thermal-processing module in lithography |
| title_full_unstemmed |
Equipment design and control of advanced thermal-processing module in lithography |
| title_sort |
equipment design and control of advanced thermal-processing module in lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55904 |
| _version_ |
1781781076691124224 |