Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees
10.1063/1.1585119
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sg-nus-scholar.10635-559552023-10-30T20:24:10Z Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1585119 Journal of Applied Physics 94 2 1222-1228 JAPIA 2014-06-17T02:49:03Z 2014-06-17T02:49:03Z 2003-07-15 Article Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K. (2003-07-15). Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees. Journal of Applied Physics 94 (2) : 1222-1228. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1585119 00218979 http://scholarbank.nus.edu.sg/handle/10635/55955 000183842200058 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1063/1.1585119 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. |
| format |
Article |
| author |
Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. |
| spellingShingle |
Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees |
| author_sort |
Gan, C.L. |
| title |
Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees |
| title_short |
Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees |
| title_full |
Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees |
| title_fullStr |
Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees |
| title_full_unstemmed |
Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees |
| title_sort |
experimental characterization and modeling of the reliability of three-terminal dual-damascene cu interconnect trees |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55955 |
| _version_ |
1781781084958097408 |