Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing

10.1063/1.1891290

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Bibliographic Details
Main Authors:	Choi, W.K., Ho, V., Ng, V., Ho, Y.W., Ng, S.P., Chim, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56134
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-561342023-10-25T21:34:16Z Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing Choi, W.K. Ho, V. Ng, V. Ho, Y.W. Ng, S.P. Chim, W.K. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1891290 Applied Physics Letters 86 14 1-3 APPLA 2014-06-17T02:51:07Z 2014-06-17T02:51:07Z 2005-04-04 Article Choi, W.K., Ho, V., Ng, V., Ho, Y.W., Ng, S.P., Chim, W.K. (2005-04-04). Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing. Applied Physics Letters 86 (14) : 1-3. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1891290 00036951 http://scholarbank.nus.edu.sg/handle/10635/56134 000228242700058 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1891290
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Choi, W.K. Ho, V. Ng, V. Ho, Y.W. Ng, S.P. Chim, W.K.
format	Article
author	Choi, W.K. Ho, V. Ng, V. Ho, Y.W. Ng, S.P. Chim, W.K.
spellingShingle	Choi, W.K. Ho, V. Ng, V. Ho, Y.W. Ng, S.P. Chim, W.K. Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
author_sort	Choi, W.K.
title	Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
title_short	Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
title_full	Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
title_fullStr	Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
title_full_unstemmed	Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
title_sort	germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56134
_version_	1781781115793571840

Germanium diffusion and nanocrystal formation in silicon oxide on silicon substrate under rapid thermal annealing

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