Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers

10.1063/1.2803762

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Bibliographic Details
Main Authors:	Lim, A.E.-J., Fang, W.-W., Liu, F., Lee, R.T.P., Samudra, G., Kwong, D.-L., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56264
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56264
record_format	dspace
spelling	sg-nus-scholar.10635-562642023-10-25T07:24:38Z Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers Lim, A.E.-J. Fang, W.-W. Liu, F. Lee, R.T.P. Samudra, G. Kwong, D.-L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2803762 Applied Physics Letters 91 17 - APPLA 2014-06-17T02:52:38Z 2014-06-17T02:52:38Z 2007 Article Lim, A.E.-J., Fang, W.-W., Liu, F., Lee, R.T.P., Samudra, G., Kwong, D.-L., Yeo, Y.-C. (2007). Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers. Applied Physics Letters 91 (17) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2803762 00036951 http://scholarbank.nus.edu.sg/handle/10635/56264 000250468200050 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2803762
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lim, A.E.-J. Fang, W.-W. Liu, F. Lee, R.T.P. Samudra, G. Kwong, D.-L. Yeo, Y.-C.
format	Article
author	Lim, A.E.-J. Fang, W.-W. Liu, F. Lee, R.T.P. Samudra, G. Kwong, D.-L. Yeo, Y.-C.
spellingShingle	Lim, A.E.-J. Fang, W.-W. Liu, F. Lee, R.T.P. Samudra, G. Kwong, D.-L. Yeo, Y.-C. Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
author_sort	Lim, A.E.-J.
title	Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
title_short	Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
title_full	Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
title_fullStr	Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
title_full_unstemmed	Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
title_sort	impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56264
_version_	1781781140271529984

Impact of interfacial dipole on effective work function of nickel fully silicided gate electrodes formed on rare-earth-based dielectric interlayers

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