Integrated Antennas on Si With over 100 GHz Performance, Fabricated Using an Optimized Proton Implantation Process

• Main Authors: Chan, K.T., Chin, A., Lin, Y.D., Chang, C.Y., Zhu, C.X., Li, M.F., Kwong, D.L., McAlister, S., Duh, D.S., Lin, W.J.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Antenna; Implantation; Loss; RF; Transmission line
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/56347
• Institution: National University of Singapore

10.1109/LMWC.2003.817146