Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems

10.1116/1.1501583

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Bibliographic Details
Main Authors:	Kok, K.W., Yoo, W.J., Sooriakumar, K., Pan, J.S., Lee, E.Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56399
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56399
record_format	dspace
spelling	sg-nus-scholar.10635-563992023-10-29T23:04:12Z Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems Kok, K.W. Yoo, W.J. Sooriakumar, K. Pan, J.S. Lee, E.Y. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1501583 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 5 1878-1883 JVTBD 2014-06-17T02:54:09Z 2014-06-17T02:54:09Z 2002-09 Article Kok, K.W., Yoo, W.J., Sooriakumar, K., Pan, J.S., Lee, E.Y. (2002-09). Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 (5) : 1878-1883. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1501583 10711023 http://scholarbank.nus.edu.sg/handle/10635/56399 000178669200013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1501583
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Kok, K.W. Yoo, W.J. Sooriakumar, K. Pan, J.S. Lee, E.Y.
format	Article
author	Kok, K.W. Yoo, W.J. Sooriakumar, K. Pan, J.S. Lee, E.Y.
spellingShingle	Kok, K.W. Yoo, W.J. Sooriakumar, K. Pan, J.S. Lee, E.Y. Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
author_sort	Kok, K.W.
title	Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
title_short	Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
title_full	Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
title_fullStr	Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
title_full_unstemmed	Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
title_sort	investigation of in situ trench etching process and bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56399
_version_	1781781167137095680

Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems

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