Minimum time control of conductive heating systems for microelectronics processing

10.1109/66.964325

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Bibliographic Details
Main Authors:	Tay, A., Ho, W.K., Poh, Y.P.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Lithography Minimum-time control Photoresist Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56643
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56643
record_format	dspace
spelling	sg-nus-scholar.10635-566432023-10-30T09:54:37Z Minimum time control of conductive heating systems for microelectronics processing Tay, A. Ho, W.K. Poh, Y.P. ELECTRICAL & COMPUTER ENGINEERING Lithography Minimum-time control Photoresist Temperature control 10.1109/66.964325 IEEE Transactions on Semiconductor Manufacturing 14 4 381-386 ITSME 2014-06-17T02:56:56Z 2014-06-17T02:56:56Z 2001-11 Article Tay, A., Ho, W.K., Poh, Y.P. (2001-11). Minimum time control of conductive heating systems for microelectronics processing. IEEE Transactions on Semiconductor Manufacturing 14 (4) : 381-386. ScholarBank@NUS Repository. https://doi.org/10.1109/66.964325 08946507 http://scholarbank.nus.edu.sg/handle/10635/56643 000172231100010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lithography Minimum-time control Photoresist Temperature control
spellingShingle	Lithography Minimum-time control Photoresist Temperature control Tay, A. Ho, W.K. Poh, Y.P. Minimum time control of conductive heating systems for microelectronics processing
description	10.1109/66.964325
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.K. Poh, Y.P.
format	Article
author	Tay, A. Ho, W.K. Poh, Y.P.
author_sort	Tay, A.
title	Minimum time control of conductive heating systems for microelectronics processing
title_short	Minimum time control of conductive heating systems for microelectronics processing
title_full	Minimum time control of conductive heating systems for microelectronics processing
title_fullStr	Minimum time control of conductive heating systems for microelectronics processing
title_full_unstemmed	Minimum time control of conductive heating systems for microelectronics processing
title_sort	minimum time control of conductive heating systems for microelectronics processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56643
_version_	1781781224760541184

Minimum time control of conductive heating systems for microelectronics processing

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