N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation

10.1149/1.2907381

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Main Authors: Chin, H.-C., Zhu, M., Samudra, G.S., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56846
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-568462023-10-26T20:21:22Z N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation Chin, H.-C. Zhu, M. Samudra, G.S. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2907381 Journal of the Electrochemical Society 155 7 H464-H468 JESOA 2014-06-17T02:59:19Z 2014-06-17T02:59:19Z 2008 Article Chin, H.-C., Zhu, M., Samudra, G.S., Yeo, Y.-C. (2008). N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation. Journal of the Electrochemical Society 155 (7) : H464-H468. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2907381 00134651 http://scholarbank.nus.edu.sg/handle/10635/56846 000256198900052 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1149/1.2907381
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Chin, H.-C.
Zhu, M.
Samudra, G.S.
Yeo, Y.-C.
format Article
author Chin, H.-C.
Zhu, M.
Samudra, G.S.
Yeo, Y.-C.
spellingShingle Chin, H.-C.
Zhu, M.
Samudra, G.S.
Yeo, Y.-C.
N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
author_sort Chin, H.-C.
title N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
title_short N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
title_full N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
title_fullStr N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
title_full_unstemmed N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
title_sort n-xhannel gaas mosfet with tanhfalo gate stack formed using in situ vacuum anneal and silane passivation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/56846
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