N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation
10.1149/1.2907381
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sg-nus-scholar.10635-568462023-10-26T20:21:22Z N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation Chin, H.-C. Zhu, M. Samudra, G.S. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2907381 Journal of the Electrochemical Society 155 7 H464-H468 JESOA 2014-06-17T02:59:19Z 2014-06-17T02:59:19Z 2008 Article Chin, H.-C., Zhu, M., Samudra, G.S., Yeo, Y.-C. (2008). N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation. Journal of the Electrochemical Society 155 (7) : H464-H468. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2907381 00134651 http://scholarbank.nus.edu.sg/handle/10635/56846 000256198900052 Scopus |
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ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Chin, H.-C. Zhu, M. Samudra, G.S. Yeo, Y.-C. |
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Chin, H.-C. Zhu, M. Samudra, G.S. Yeo, Y.-C. |
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Chin, H.-C. Zhu, M. Samudra, G.S. Yeo, Y.-C. N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation |
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Chin, H.-C. |
title |
N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation |
title_short |
N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation |
title_full |
N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation |
title_fullStr |
N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation |
title_full_unstemmed |
N-xhannel GaAs MOSFET with TaNHfAlO gate stack formed using in situ vacuum anneal and silane passivation |
title_sort |
n-xhannel gaas mosfet with tanhfalo gate stack formed using in situ vacuum anneal and silane passivation |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/56846 |
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1781781291065147392 |