Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain

10.1109/LED.2009.2028660

Saved in:

Bibliographic Details
Main Authors:	Wong, H.-S., Chan, L., Samudra, G., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Schottky barrier Selenium segregation Silicide contact resistance Ultrathin body (UTB)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57355
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-57355
record_format	dspace
spelling	sg-nus-scholar.10635-573552024-11-09T07:32:04Z Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain Wong, H.-S. Chan, L. Samudra, G. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Schottky barrier Selenium segregation Silicide contact resistance Ultrathin body (UTB) 10.1109/LED.2009.2028660 IEEE Electron Device Letters 30 10 1087-1089 EDLED 2014-06-17T03:05:14Z 2014-06-17T03:05:14Z 2009-10 Article Wong, H.-S., Chan, L., Samudra, G., Yeo, Y.-C. (2009-10). Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain. IEEE Electron Device Letters 30 (10) : 1087-1089. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2028660 07413106 http://scholarbank.nus.edu.sg/handle/10635/57355 000270227600025 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Schottky barrier Selenium segregation Silicide contact resistance Ultrathin body (UTB)
spellingShingle	Schottky barrier Selenium segregation Silicide contact resistance Ultrathin body (UTB) Wong, H.-S. Chan, L. Samudra, G. Yeo, Y.-C. Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain
description	10.1109/LED.2009.2028660
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wong, H.-S. Chan, L. Samudra, G. Yeo, Y.-C.
format	Article
author	Wong, H.-S. Chan, L. Samudra, G. Yeo, Y.-C.
author_sort	Wong, H.-S.
title	Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain
title_short	Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain
title_full	Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain
title_fullStr	Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain
title_full_unstemmed	Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain
title_sort	selenium segregation for lowering the contact resistance in ultrathin-body mosfets with fully metallized source/drain
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57355
_version_	1821188108175015936

Selenium segregation for lowering the contact resistance in ultrathin-body MOSFETs with fully metallized source/drain

Similar Items