Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application

10.1116/1.2083930

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Bibliographic Details
Main Authors:	Samanta, S.K., Tan, Z.Y.L., Yoo, W.J., Samudra, G., Lee, S., Bera, L.K., Balasubramanian, N.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57359
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57359
record_format	dspace
spelling	sg-nus-scholar.10635-573592023-10-30T10:27:10Z Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application Samanta, S.K. Tan, Z.Y.L. Yoo, W.J. Samudra, G. Lee, S. Bera, L.K. Balasubramanian, N. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2083930 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 6 2278-2283 JVTBD 2014-06-17T03:05:17Z 2014-06-17T03:05:17Z 2005-11 Article Samanta, S.K., Tan, Z.Y.L., Yoo, W.J., Samudra, G., Lee, S., Bera, L.K., Balasubramanian, N. (2005-11). Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (6) : 2278-2283. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2083930 10711023 http://scholarbank.nus.edu.sg/handle/10635/57359 000234613200007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.2083930
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Samanta, S.K. Tan, Z.Y.L. Yoo, W.J. Samudra, G. Lee, S. Bera, L.K. Balasubramanian, N.
format	Article
author	Samanta, S.K. Tan, Z.Y.L. Yoo, W.J. Samudra, G. Lee, S. Bera, L.K. Balasubramanian, N.
spellingShingle	Samanta, S.K. Tan, Z.Y.L. Yoo, W.J. Samudra, G. Lee, S. Bera, L.K. Balasubramanian, N. Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
author_sort	Samanta, S.K.
title	Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
title_short	Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
title_full	Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
title_fullStr	Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
title_full_unstemmed	Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
title_sort	self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57359
_version_	1781781394640338944

Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application

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