Study of the morphological modifications induced by laser annealing of preamorphized silicon

10.1016/S0218-625X(01)00120-8

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Bibliographic Details
Main Authors: Chong, Y.F., Pey, K.L., Lu, Y.F., Wee, A.T.S., See, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57542
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Institution: National University of Singapore
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