Subwavelength lithography by waveguide mode interference
10.1063/1.3651274
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sg-nus-scholar.10635-575592024-11-08T20:04:17Z Subwavelength lithography by waveguide mode interference Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3651274 Applied Physics Letters 99 15 - APPLA 2014-06-17T03:07:35Z 2014-06-17T03:07:35Z 2011-10-10 Article Wang, B., Bian Chew, A., Teng, J., Si, G., Danner, A.J. (2011-10-10). Subwavelength lithography by waveguide mode interference. Applied Physics Letters 99 (15) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3651274 00036951 http://scholarbank.nus.edu.sg/handle/10635/57559 000295883800006 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.3651274 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J. |
| format |
Article |
| author |
Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J. |
| spellingShingle |
Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J. Subwavelength lithography by waveguide mode interference |
| author_sort |
Wang, B. |
| title |
Subwavelength lithography by waveguide mode interference |
| title_short |
Subwavelength lithography by waveguide mode interference |
| title_full |
Subwavelength lithography by waveguide mode interference |
| title_fullStr |
Subwavelength lithography by waveguide mode interference |
| title_full_unstemmed |
Subwavelength lithography by waveguide mode interference |
| title_sort |
subwavelength lithography by waveguide mode interference |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57559 |
| _version_ |
1821199614795055104 |