Subwavelength lithography by waveguide mode interference

10.1063/1.3651274

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Bibliographic Details
Main Authors:	Wang, B., Bian Chew, A., Teng, J., Si, G., Danner, A.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57559
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57559
record_format	dspace
spelling	sg-nus-scholar.10635-575592024-11-08T20:04:17Z Subwavelength lithography by waveguide mode interference Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3651274 Applied Physics Letters 99 15 - APPLA 2014-06-17T03:07:35Z 2014-06-17T03:07:35Z 2011-10-10 Article Wang, B., Bian Chew, A., Teng, J., Si, G., Danner, A.J. (2011-10-10). Subwavelength lithography by waveguide mode interference. Applied Physics Letters 99 (15) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3651274 00036951 http://scholarbank.nus.edu.sg/handle/10635/57559 000295883800006 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3651274
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J.
format	Article
author	Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J.
spellingShingle	Wang, B. Bian Chew, A. Teng, J. Si, G. Danner, A.J. Subwavelength lithography by waveguide mode interference
author_sort	Wang, B.
title	Subwavelength lithography by waveguide mode interference
title_short	Subwavelength lithography by waveguide mode interference
title_full	Subwavelength lithography by waveguide mode interference
title_fullStr	Subwavelength lithography by waveguide mode interference
title_full_unstemmed	Subwavelength lithography by waveguide mode interference
title_sort	subwavelength lithography by waveguide mode interference
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57559
_version_	1821199614795055104

Subwavelength lithography by waveguide mode interference

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