A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging

A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging

10.1109/JSTQE.2009.2034271

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Bibliographic Details
Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Yeoh, W.G., Lo, G.-Q., Kwong, D.-L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Active alignment
Assembly
Electrothermal actuation
Mechanical locking
Microactuators
Si photonics
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59262
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Institution: National University of Singapore
Description
Summary:10.1109/JSTQE.2009.2034271

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