A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging

A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging

10.1109/JSTQE.2009.2034271

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Bibliographic Details
Main Authors: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Yeoh, W.G., Lo, G.-Q., Kwong, D.-L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Active alignment
Assembly
Electrothermal actuation
Mechanical locking
Microactuators
Si photonics
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59262
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Institution: National University of Singapore
id sg-nus-scholar.10635-59262
record_format dspace
spelling sg-nus-scholar.10635-592622023-10-25T21:29:48Z A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Yeoh, W.G. Lo, G.-Q. Kwong, D.-L. MECHANICAL ENGINEERING Active alignment Assembly Electrothermal actuation Mechanical locking Microactuators Si photonics 10.1109/JSTQE.2009.2034271 IEEE Journal on Selected Topics in Quantum Electronics 16 1 267-275 IJSQE 2014-06-17T06:09:24Z 2014-06-17T06:09:24Z 2010-01 Article Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Yeoh, W.G., Lo, G.-Q., Kwong, D.-L. (2010-01). A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging. IEEE Journal on Selected Topics in Quantum Electronics 16 (1) : 267-275. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2034271 1077260X http://scholarbank.nus.edu.sg/handle/10635/59262 000274382900031 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Active alignment
Assembly
Electrothermal actuation
Mechanical locking
Microactuators
Si photonics
spellingShingle Active alignment
Assembly
Electrothermal actuation
Mechanical locking
Microactuators
Si photonics
Zhang, Q.X.
Du, Y.
Tan, C.W.
Zhang, J.
Yu, M.B.
Yeoh, W.G.
Lo, G.-Q.
Kwong, D.-L.
A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
description 10.1109/JSTQE.2009.2034271
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Zhang, Q.X.
Du, Y.
Tan, C.W.
Zhang, J.
Yu, M.B.
Yeoh, W.G.
Lo, G.-Q.
Kwong, D.-L.
format Article
author Zhang, Q.X.
Du, Y.
Tan, C.W.
Zhang, J.
Yu, M.B.
Yeoh, W.G.
Lo, G.-Q.
Kwong, D.-L.
author_sort Zhang, Q.X.
title A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
title_short A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
title_full A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
title_fullStr A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
title_full_unstemmed A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
title_sort silicon platform with mems active alignment function and its potential application in si-photonics packaging
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/59262
_version_ 1781781593696763904

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