Adhesive bonding with SU-8 at wafer level for microfluidic devices

10.1088/1742-6596/34/1/128

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Bibliographic Details
Main Authors:	Yu, L., Tay, F.E.H., Xu, G., Chen, B., Avram, M., Iliescu, C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Adhesive bonding Contact imprinting SU-8 photoresist Wafer-to-wafer bonding
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59377
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-59377
record_format	dspace
spelling	sg-nus-scholar.10635-593772024-11-13T14:30:15Z Adhesive bonding with SU-8 at wafer level for microfluidic devices Yu, L. Tay, F.E.H. Xu, G. Chen, B. Avram, M. Iliescu, C. MECHANICAL ENGINEERING Adhesive bonding Contact imprinting SU-8 photoresist Wafer-to-wafer bonding 10.1088/1742-6596/34/1/128 Journal of Physics: Conference Series 34 1 776-781 2014-06-17T06:10:43Z 2014-06-17T06:10:43Z 2006-04-01 Article Yu, L., Tay, F.E.H., Xu, G., Chen, B., Avram, M., Iliescu, C. (2006-04-01). Adhesive bonding with SU-8 at wafer level for microfluidic devices. Journal of Physics: Conference Series 34 (1) : 776-781. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/128 17426588 http://scholarbank.nus.edu.sg/handle/10635/59377 000286667100128 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Adhesive bonding Contact imprinting SU-8 photoresist Wafer-to-wafer bonding
spellingShingle	Adhesive bonding Contact imprinting SU-8 photoresist Wafer-to-wafer bonding Yu, L. Tay, F.E.H. Xu, G. Chen, B. Avram, M. Iliescu, C. Adhesive bonding with SU-8 at wafer level for microfluidic devices
description	10.1088/1742-6596/34/1/128
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Yu, L. Tay, F.E.H. Xu, G. Chen, B. Avram, M. Iliescu, C.
format	Article
author	Yu, L. Tay, F.E.H. Xu, G. Chen, B. Avram, M. Iliescu, C.
author_sort	Yu, L.
title	Adhesive bonding with SU-8 at wafer level for microfluidic devices
title_short	Adhesive bonding with SU-8 at wafer level for microfluidic devices
title_full	Adhesive bonding with SU-8 at wafer level for microfluidic devices
title_fullStr	Adhesive bonding with SU-8 at wafer level for microfluidic devices
title_full_unstemmed	Adhesive bonding with SU-8 at wafer level for microfluidic devices
title_sort	adhesive bonding with su-8 at wafer level for microfluidic devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59377
_version_	1821227664743071744

Adhesive bonding with SU-8 at wafer level for microfluidic devices

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