Adhesive bonding with SU-8 at wafer level for microfluidic devices
10.1088/1742-6596/34/1/128
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Main Authors: | Yu, L., Tay, F.E.H., Xu, G., Chen, B., Avram, M., Iliescu, C. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59377 |
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Institution: | National University of Singapore |
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