Circular apertures for contact hole patterning in 193 nm immersion lithography
10.1116/1.3546100
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sg-nus-scholar.10635-597092023-10-29T22:52:12Z Circular apertures for contact hole patterning in 193 nm immersion lithography Tay, C.J. Quan, C. Ling, M.L. Chua, G.S. Tan, S.K. Lin, Q. MECHANICAL ENGINEERING 10.1116/1.3546100 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 2 - JVTBD 2014-06-17T06:14:42Z 2014-06-17T06:14:42Z 2011-03 Article Tay, C.J., Quan, C., Ling, M.L., Chua, G.S., Tan, S.K., Lin, Q. (2011-03). Circular apertures for contact hole patterning in 193 nm immersion lithography. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3546100 10711023 http://scholarbank.nus.edu.sg/handle/10635/59709 000289166000008 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.3546100 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tay, C.J. Quan, C. Ling, M.L. Chua, G.S. Tan, S.K. Lin, Q. |
| format |
Article |
| author |
Tay, C.J. Quan, C. Ling, M.L. Chua, G.S. Tan, S.K. Lin, Q. |
| spellingShingle |
Tay, C.J. Quan, C. Ling, M.L. Chua, G.S. Tan, S.K. Lin, Q. Circular apertures for contact hole patterning in 193 nm immersion lithography |
| author_sort |
Tay, C.J. |
| title |
Circular apertures for contact hole patterning in 193 nm immersion lithography |
| title_short |
Circular apertures for contact hole patterning in 193 nm immersion lithography |
| title_full |
Circular apertures for contact hole patterning in 193 nm immersion lithography |
| title_fullStr |
Circular apertures for contact hole patterning in 193 nm immersion lithography |
| title_full_unstemmed |
Circular apertures for contact hole patterning in 193 nm immersion lithography |
| title_sort |
circular apertures for contact hole patterning in 193 nm immersion lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/59709 |
| _version_ |
1781781684577894400 |