High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating
10.1088/0960-1317/18/8/085013
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2014
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sg-nus-scholar.10635-604532023-10-30T22:10:41Z High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating Zhou, G. Du, Y. Zhang, Q. Feng, H. Chau, F.S. MECHANICAL ENGINEERING 10.1088/0960-1317/18/8/085013 Journal of Micromechanics and Microengineering 18 8 - JMMIE 2014-06-17T06:23:24Z 2014-06-17T06:23:24Z 2008-08-01 Article Zhou, G., Du, Y., Zhang, Q., Feng, H., Chau, F.S. (2008-08-01). High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating. Journal of Micromechanics and Microengineering 18 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/8/085013 09601317 http://scholarbank.nus.edu.sg/handle/10635/60453 000257891600015 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/18/8/085013 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Zhou, G. Du, Y. Zhang, Q. Feng, H. Chau, F.S. |
| format |
Article |
| author |
Zhou, G. Du, Y. Zhang, Q. Feng, H. Chau, F.S. |
| spellingShingle |
Zhou, G. Du, Y. Zhang, Q. Feng, H. Chau, F.S. High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating |
| author_sort |
Zhou, G. |
| title |
High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating |
| title_short |
High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating |
| title_full |
High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating |
| title_fullStr |
High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating |
| title_full_unstemmed |
High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating |
| title_sort |
high-speed, high-optical-efficiency laser scanning using a mems-based in-plane vibratory sub-wavelength diffraction grating |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60453 |
| _version_ |
1781781844767801344 |