High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating
10.1088/0960-1317/18/8/085013
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Main Authors: | Zhou, G., Du, Y., Zhang, Q., Feng, H., Chau, F.S. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60453 |
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Institution: | National University of Singapore |
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