MEMS electrostatic double T-shaped spring mechanism for circumferential scanning

10.1109/JMEMS.2013.2255115

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Bibliographic Details
Main Authors:	Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, D.W.K., Kumar, A.S., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Full circumferential scanning Microelectromechanical systems (MEMS) Optical coherence tomography (OCT) Pyramidal polygon microreflector Soft lithography Two-stage double T-shaped spring system
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60715
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60715
record_format	dspace
spelling	sg-nus-scholar.10635-607152024-11-14T17:55:24Z MEMS electrostatic double T-shaped spring mechanism for circumferential scanning Mu, X. Zhou, G. Yu, H. Tsai, J.M.-L. Neo, D.W.K. Kumar, A.S. Chau, F.S. MECHANICAL ENGINEERING Full circumferential scanning Microelectromechanical systems (MEMS) Optical coherence tomography (OCT) Pyramidal polygon microreflector Soft lithography Two-stage double T-shaped spring system 10.1109/JMEMS.2013.2255115 Journal of Microelectromechanical Systems 22 5 1147-1157 JMIYE 2014-06-17T06:26:29Z 2014-06-17T06:26:29Z 2013 Article Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, D.W.K., Kumar, A.S., Chau, F.S. (2013). MEMS electrostatic double T-shaped spring mechanism for circumferential scanning. Journal of Microelectromechanical Systems 22 (5) : 1147-1157. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2013.2255115 10577157 http://scholarbank.nus.edu.sg/handle/10635/60715 000325410300023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Full circumferential scanning Microelectromechanical systems (MEMS) Optical coherence tomography (OCT) Pyramidal polygon microreflector Soft lithography Two-stage double T-shaped spring system
spellingShingle	Full circumferential scanning Microelectromechanical systems (MEMS) Optical coherence tomography (OCT) Pyramidal polygon microreflector Soft lithography Two-stage double T-shaped spring system Mu, X. Zhou, G. Yu, H. Tsai, J.M.-L. Neo, D.W.K. Kumar, A.S. Chau, F.S. MEMS electrostatic double T-shaped spring mechanism for circumferential scanning
description	10.1109/JMEMS.2013.2255115
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Mu, X. Zhou, G. Yu, H. Tsai, J.M.-L. Neo, D.W.K. Kumar, A.S. Chau, F.S.
format	Article
author	Mu, X. Zhou, G. Yu, H. Tsai, J.M.-L. Neo, D.W.K. Kumar, A.S. Chau, F.S.
author_sort	Mu, X.
title	MEMS electrostatic double T-shaped spring mechanism for circumferential scanning
title_short	MEMS electrostatic double T-shaped spring mechanism for circumferential scanning
title_full	MEMS electrostatic double T-shaped spring mechanism for circumferential scanning
title_fullStr	MEMS electrostatic double T-shaped spring mechanism for circumferential scanning
title_full_unstemmed	MEMS electrostatic double T-shaped spring mechanism for circumferential scanning
title_sort	mems electrostatic double t-shaped spring mechanism for circumferential scanning
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60715
_version_	1821230874338787328

MEMS electrostatic double T-shaped spring mechanism for circumferential scanning

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