MEMS electrostatic double T-shaped spring mechanism for circumferential scanning

MEMS electrostatic double T-shaped spring mechanism for circumferential scanning

10.1109/JMEMS.2013.2255115

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Bibliographic Details
Main Authors: Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, D.W.K., Kumar, A.S., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Full circumferential scanning
Microelectromechanical systems (MEMS)
Optical coherence tomography (OCT)
Pyramidal polygon microreflector
Soft lithography
Two-stage double T-shaped spring system
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60715
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/60715

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