Stress control in masking layers for deep wet micromachining of Pyrex glass
10.1016/j.sna.2004.03.004
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sg-nus-scholar.10635-613822023-10-25T20:21:48Z Stress control in masking layers for deep wet micromachining of Pyrex glass Iliescu, C. Miao, J. Tay, F.E.H. MECHANICAL ENGINEERING Amorphous silicon Masking layer Residual stress Wet etching of glass 10.1016/j.sna.2004.03.004 Sensors and Actuators, A: Physical 117 2 286-292 SAAPE 2014-06-17T06:34:26Z 2014-06-17T06:34:26Z 2005-01-14 Article Iliescu, C., Miao, J., Tay, F.E.H. (2005-01-14). Stress control in masking layers for deep wet micromachining of Pyrex glass. Sensors and Actuators, A: Physical 117 (2) : 286-292. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2004.03.004 09244247 http://scholarbank.nus.edu.sg/handle/10635/61382 000225343800014 Scopus |
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Amorphous silicon Masking layer Residual stress Wet etching of glass |
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Amorphous silicon Masking layer Residual stress Wet etching of glass Iliescu, C. Miao, J. Tay, F.E.H. Stress control in masking layers for deep wet micromachining of Pyrex glass |
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10.1016/j.sna.2004.03.004 |
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MECHANICAL ENGINEERING |
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MECHANICAL ENGINEERING Iliescu, C. Miao, J. Tay, F.E.H. |
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Article |
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Iliescu, C. Miao, J. Tay, F.E.H. |
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Iliescu, C. |
title |
Stress control in masking layers for deep wet micromachining of Pyrex glass |
title_short |
Stress control in masking layers for deep wet micromachining of Pyrex glass |
title_full |
Stress control in masking layers for deep wet micromachining of Pyrex glass |
title_fullStr |
Stress control in masking layers for deep wet micromachining of Pyrex glass |
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Stress control in masking layers for deep wet micromachining of Pyrex glass |
title_sort |
stress control in masking layers for deep wet micromachining of pyrex glass |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/61382 |
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