Stress control in masking layers for deep wet micromachining of Pyrex glass

10.1016/j.sna.2004.03.004

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Main Authors: Iliescu, C., Miao, J., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/61382
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-613822023-10-25T20:21:48Z Stress control in masking layers for deep wet micromachining of Pyrex glass Iliescu, C. Miao, J. Tay, F.E.H. MECHANICAL ENGINEERING Amorphous silicon Masking layer Residual stress Wet etching of glass 10.1016/j.sna.2004.03.004 Sensors and Actuators, A: Physical 117 2 286-292 SAAPE 2014-06-17T06:34:26Z 2014-06-17T06:34:26Z 2005-01-14 Article Iliescu, C., Miao, J., Tay, F.E.H. (2005-01-14). Stress control in masking layers for deep wet micromachining of Pyrex glass. Sensors and Actuators, A: Physical 117 (2) : 286-292. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2004.03.004 09244247 http://scholarbank.nus.edu.sg/handle/10635/61382 000225343800014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Amorphous silicon
Masking layer
Residual stress
Wet etching of glass
spellingShingle Amorphous silicon
Masking layer
Residual stress
Wet etching of glass
Iliescu, C.
Miao, J.
Tay, F.E.H.
Stress control in masking layers for deep wet micromachining of Pyrex glass
description 10.1016/j.sna.2004.03.004
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Iliescu, C.
Miao, J.
Tay, F.E.H.
format Article
author Iliescu, C.
Miao, J.
Tay, F.E.H.
author_sort Iliescu, C.
title Stress control in masking layers for deep wet micromachining of Pyrex glass
title_short Stress control in masking layers for deep wet micromachining of Pyrex glass
title_full Stress control in masking layers for deep wet micromachining of Pyrex glass
title_fullStr Stress control in masking layers for deep wet micromachining of Pyrex glass
title_full_unstemmed Stress control in masking layers for deep wet micromachining of Pyrex glass
title_sort stress control in masking layers for deep wet micromachining of pyrex glass
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61382
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