Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation

10.1016/j.ijmachtools.2006.02.016

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Main Authors:	Cai, M.B., Li, X.P., Rahman, M.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61405
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61405
record_format	dspace
spelling	sg-nus-scholar.10635-614052023-10-30T08:12:32Z Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation Cai, M.B. Li, X.P. Rahman, M. MECHANICAL ENGINEERING Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress 10.1016/j.ijmachtools.2006.02.016 International Journal of Machine Tools and Manufacture 47 1 75-80 IMTME 2014-06-17T06:34:42Z 2014-06-17T06:34:42Z 2007-01 Article Cai, M.B., Li, X.P., Rahman, M. (2007-01). Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation. International Journal of Machine Tools and Manufacture 47 (1) : 75-80. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2006.02.016 08906955 http://scholarbank.nus.edu.sg/handle/10635/61405 000242258500008 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress
spellingShingle	Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress Cai, M.B. Li, X.P. Rahman, M. Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
description	10.1016/j.ijmachtools.2006.02.016
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Cai, M.B. Li, X.P. Rahman, M.
format	Article
author	Cai, M.B. Li, X.P. Rahman, M.
author_sort	Cai, M.B.
title	Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
title_short	Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
title_full	Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
title_fullStr	Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
title_full_unstemmed	Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
title_sort	study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61405
_version_	1781782043607171072

Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation

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