Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
10.1016/j.ijmachtools.2006.02.016
محفوظ في:
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| التنسيق: | مقال |
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2014
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| الوصول للمادة أونلاين: | http://scholarbank.nus.edu.sg/handle/10635/61405 |
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sg-nus-scholar.10635-614052024-11-13T23:27:45Z Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation Cai, M.B. Li, X.P. Rahman, M. MECHANICAL ENGINEERING Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress 10.1016/j.ijmachtools.2006.02.016 International Journal of Machine Tools and Manufacture 47 1 75-80 IMTME 2014-06-17T06:34:42Z 2014-06-17T06:34:42Z 2007-01 Article Cai, M.B., Li, X.P., Rahman, M. (2007-01). Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation. International Journal of Machine Tools and Manufacture 47 (1) : 75-80. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2006.02.016 08906955 http://scholarbank.nus.edu.sg/handle/10635/61405 000242258500008 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress |
| spellingShingle |
Ductile mode cutting Force Molecular Dynamics Silicon wafer Stress Cai, M.B. Li, X.P. Rahman, M. Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| description |
10.1016/j.ijmachtools.2006.02.016 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Cai, M.B. Li, X.P. Rahman, M. |
| format |
Article |
| author |
Cai, M.B. Li, X.P. Rahman, M. |
| author_sort |
Cai, M.B. |
| title |
Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| title_short |
Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| title_full |
Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| title_fullStr |
Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| title_full_unstemmed |
Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| title_sort |
study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/61405 |
| _version_ |
1821188426151493632 |