A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress

Materials Research Society Symposium - Proceedings

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Main Authors: Guan, H., Xu, Z., Cho, B.J., Li, M.F., He, Y.D.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61719
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-617192015-01-15T22:37:23Z A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress Guan, H. Xu, Z. Cho, B.J. Li, M.F. He, Y.D. ELECTRICAL ENGINEERING Materials Research Society Symposium - Proceedings 592 105-110 MRSPD 2014-06-17T06:43:13Z 2014-06-17T06:43:13Z 2000 Article Guan, H.,Xu, Z.,Cho, B.J.,Li, M.F.,He, Y.D. (2000). A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress. Materials Research Society Symposium - Proceedings 592 : 105-110. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/61719 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Guan, H.
Xu, Z.
Cho, B.J.
Li, M.F.
He, Y.D.
format Article
author Guan, H.
Xu, Z.
Cho, B.J.
Li, M.F.
He, Y.D.
spellingShingle Guan, H.
Xu, Z.
Cho, B.J.
Li, M.F.
He, Y.D.
A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
author_sort Guan, H.
title A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
title_short A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
title_full A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
title_fullStr A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
title_full_unstemmed A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
title_sort study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61719
_version_ 1681085644709822464