A study of quasi-breakdown mechanism in ultrathin gate oxide under various types of stress
Materials Research Society Symposium - Proceedings
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Main Authors: | Guan, H., Xu, Z., Cho, B.J., Li, M.F., He, Y.D. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/61719 |
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Institution: | National University of Singapore |
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