Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite

Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite

Applied Surface Science

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Bibliographic Details
Main Authors: Feng, L.Y., Min, R.Z., Qiao, N.H., Feng, H.Z., Chan, D.S.H., Seng, L.T., Yin, C.S., Gamani, K., Geng, C., Kun, L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Carbon nitride
Ellipsometry
Laser ablation
Raman spectroscopy
Thin films
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61918
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Institution: National University of Singapore
Description
Summary:Applied Surface Science

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