Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite

• Main Authors: Feng, L.Y., Min, R.Z., Qiao, N.H., Feng, H.Z., Chan, D.S.H., Seng, L.T., Yin, C.S., Gamani, K., Geng, C., Kun, L.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Carbon nitride; Ellipsometry; Laser ablation; Raman spectroscopy; Thin films; XPS
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/61918
• Institution: National University of Singapore

Applied Surface Science