Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films

Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films

Thin Solid Films

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Bibliographic Details
Main Authors: Choi, W.K., Han, K.K., Chim, W.K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Annealing
Metal-oxide-semiconductor structure
Silicon oxide
Sputtering
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62113
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Institution: National University of Singapore
Description
Summary:Thin Solid Films

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