Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films

Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films

Thin Solid Films

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Bibliographic Details
Main Authors: Choi, W.K., Han, K.K., Chim, W.K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Annealing
Metal-oxide-semiconductor structure
Silicon oxide
Sputtering
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62113
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-621132015-04-06T05:05:26Z Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films Choi, W.K. Han, K.K. Chim, W.K. ELECTRICAL ENGINEERING Annealing Metal-oxide-semiconductor structure Silicon oxide Sputtering Thin Solid Films 343-344 1-2 108-110 THSFA 2014-06-17T06:47:32Z 2014-06-17T06:47:32Z 1999 Article Choi, W.K.,Han, K.K.,Chim, W.K. (1999). Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films. Thin Solid Films 343-344 (1-2) : 108-110. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/62113 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Annealing
Metal-oxide-semiconductor structure
Silicon oxide
Sputtering
spellingShingle Annealing
Metal-oxide-semiconductor structure
Silicon oxide
Sputtering
Choi, W.K.
Han, K.K.
Chim, W.K.
Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
description Thin Solid Films
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Choi, W.K.
Han, K.K.
Chim, W.K.
format Article
author Choi, W.K.
Han, K.K.
Chim, W.K.
author_sort Choi, W.K.
title Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
title_short Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
title_full Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
title_fullStr Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
title_full_unstemmed Electrical and structural properties of rapid thermal annealed RF sputtered silicon oxide films
title_sort electrical and structural properties of rapid thermal annealed rf sputtered silicon oxide films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/62113
_version_ 1681085716494286848

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