Modelling techniques for the quantification of some electron beam induced phenomena

• Main Authors: Chim, W.K., Chan, D.S.H., Low, T.S., Phang, J.C.H., Sim, K.S., Pey, K.L., Dinnis, A.R., Holt, D.B., Nakamae, K., Schottler, M.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/62432
• Institution: National University of Singapore

Scanning Microscopy