Modelling techniques for the quantification of some electron beam induced phenomena
Scanning Microscopy
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Main Authors: | Chim, W.K., Chan, D.S.H., Low, T.S., Phang, J.C.H., Sim, K.S., Pey, K.L., Dinnis, A.R., Holt, D.B., Nakamae, K., Schottler, M. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/62432 |
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Institution: | National University of Singapore |
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