Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability
10.1016/j.mseb.2008.10.013
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2014
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sg-nus-scholar.10635-638882023-10-30T07:29:32Z Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability Mok, K.R.C. Yeong, S.H. Colombeau, B. Benistant, F. Poon, C.H. Chan, L. Srinivasan, M.P. CHEMICAL & BIOMOLECULAR ENGINEERING Advanced annealing technique Atomistic simulation Diffusion Dopant deactivation Flash lamp annealing Junction stability 10.1016/j.mseb.2008.10.013 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 154-155 1-3 14-19 MSBTE 2014-06-17T07:40:44Z 2014-06-17T07:40:44Z 2008-12-05 Article Mok, K.R.C., Yeong, S.H., Colombeau, B., Benistant, F., Poon, C.H., Chan, L., Srinivasan, M.P. (2008-12-05). Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 154-155 (1-3) : 14-19. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mseb.2008.10.013 09215107 http://scholarbank.nus.edu.sg/handle/10635/63888 000262187600003 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
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Advanced annealing technique Atomistic simulation Diffusion Dopant deactivation Flash lamp annealing Junction stability |
| spellingShingle |
Advanced annealing technique Atomistic simulation Diffusion Dopant deactivation Flash lamp annealing Junction stability Mok, K.R.C. Yeong, S.H. Colombeau, B. Benistant, F. Poon, C.H. Chan, L. Srinivasan, M.P. Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| description |
10.1016/j.mseb.2008.10.013 |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Mok, K.R.C. Yeong, S.H. Colombeau, B. Benistant, F. Poon, C.H. Chan, L. Srinivasan, M.P. |
| format |
Article |
| author |
Mok, K.R.C. Yeong, S.H. Colombeau, B. Benistant, F. Poon, C.H. Chan, L. Srinivasan, M.P. |
| author_sort |
Mok, K.R.C. |
| title |
Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| title_short |
Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| title_full |
Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| title_fullStr |
Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| title_full_unstemmed |
Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| title_sort |
experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/63888 |
| _version_ |
1781782338035777536 |