A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing
10.1117/12.654331
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2014
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sg-nus-scholar.10635-688472023-10-30T21:24:59Z A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing Tay, A. Chua, H.-T. Wu, X. Wang, Y. ELECTRICAL & COMPUTER ENGINEERING 10.1117/12.654331 Proceedings of SPIE - The International Society for Optical Engineering 6153 II - PSISD 2014-06-19T02:53:53Z 2014-06-19T02:53:53Z 2006 Conference Paper Tay, A., Chua, H.-T., Wu, X., Wang, Y. (2006). A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing. Proceedings of SPIE - The International Society for Optical Engineering 6153 II : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.654331 0819461962 0277786X http://scholarbank.nus.edu.sg/handle/10635/68847 000238175500155 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| description |
10.1117/12.654331 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Chua, H.-T. Wu, X. Wang, Y. |
| format |
Conference or Workshop Item |
| author |
Tay, A. Chua, H.-T. Wu, X. Wang, Y. |
| spellingShingle |
Tay, A. Chua, H.-T. Wu, X. Wang, Y. A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| author_sort |
Tay, A. |
| title |
A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| title_short |
A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| title_full |
A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| title_fullStr |
A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| title_full_unstemmed |
A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| title_sort |
lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/68847 |
| _version_ |
1781783064417927168 |