A new approach for eliminating unwanted patterns in attenuated phase shift masks

10.1016/S0026-2692(03)00195-2

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Bibliographic Details
Main Authors:	Mukherjee-Roy, M., Singh, N., Mehta, S.S., Samudra, G.S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Attenuated phase shift masks Masks Optical microlithography
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68912
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-68912
record_format	dspace
spelling	sg-nus-scholar.10635-689122023-10-29T23:37:27Z A new approach for eliminating unwanted patterns in attenuated phase shift masks Mukherjee-Roy, M. Singh, N. Mehta, S.S. Samudra, G.S. ELECTRICAL & COMPUTER ENGINEERING Attenuated phase shift masks Masks Optical microlithography 10.1016/S0026-2692(03)00195-2 Microelectronics Journal 34 10 965-967 MICEB 2014-06-19T02:54:39Z 2014-06-19T02:54:39Z 2003-10 Conference Paper Mukherjee-Roy, M., Singh, N., Mehta, S.S., Samudra, G.S. (2003-10). A new approach for eliminating unwanted patterns in attenuated phase shift masks. Microelectronics Journal 34 (10) : 965-967. ScholarBank@NUS Repository. https://doi.org/10.1016/S0026-2692(03)00195-2 00262692 http://scholarbank.nus.edu.sg/handle/10635/68912 000185869300012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Attenuated phase shift masks Masks Optical microlithography
spellingShingle	Attenuated phase shift masks Masks Optical microlithography Mukherjee-Roy, M. Singh, N. Mehta, S.S. Samudra, G.S. A new approach for eliminating unwanted patterns in attenuated phase shift masks
description	10.1016/S0026-2692(03)00195-2
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Mukherjee-Roy, M. Singh, N. Mehta, S.S. Samudra, G.S.
format	Conference or Workshop Item
author	Mukherjee-Roy, M. Singh, N. Mehta, S.S. Samudra, G.S.
author_sort	Mukherjee-Roy, M.
title	A new approach for eliminating unwanted patterns in attenuated phase shift masks
title_short	A new approach for eliminating unwanted patterns in attenuated phase shift masks
title_full	A new approach for eliminating unwanted patterns in attenuated phase shift masks
title_fullStr	A new approach for eliminating unwanted patterns in attenuated phase shift masks
title_full_unstemmed	A new approach for eliminating unwanted patterns in attenuated phase shift masks
title_sort	new approach for eliminating unwanted patterns in attenuated phase shift masks
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/68912
_version_	1781783072171098112

A new approach for eliminating unwanted patterns in attenuated phase shift masks

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