A new approach for eliminating unwanted patterns in attenuated phase shift masks

A new approach for eliminating unwanted patterns in attenuated phase shift masks

10.1016/S0026-2692(03)00195-2

Saved in:

書目詳細資料
Main Authors:	Mukherjee-Roy, M., Singh, N., Mehta, S.S., Samudra, G.S.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
主題:	Attenuated phase shift masks Masks Optical microlithography
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/68912
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

相似書籍

Impact of transmission error for attenuated phase shift mask for 0.10 um Technology
由: Tan, S.K., et al.
出版: (2014)

MEF studies for attenuated phase shift mask for sub 0.13 um technology using 248 nm
由: Tan, S.K., et al.
出版: (2014)

Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
由: Huang, Z., et al.
出版: (2014)

Application of deep ultraviolet lithography in magnetic nanostructures
由: SINGH NAVAB
出版: (2010)

Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
由: Chua, G.S., et al.
出版: (2014)

Transformable masks for colloidal nanosynthesis
由: Wang, Zhenxing, et al.
出版: (2018)

Characterization of assist features on impact of mask error enhancement factors for sub-0.13 um technology
由: Tan, S.K., et al.
出版: (2014)

Fabrication of magnetic nanostructures using KrF lithography
由: Singh, N., et al.
出版: (2014)

The Characterization of Chromeless Phase Shift Mask Technique for Sub-45nm Lithography
由: TAN SOON YOENG
出版: (2010)

Khon masks
由: Dhanit Yupho
出版: (1960)

When to use a mask
出版: (2020)

Deblurring, artifact-free optical coherence tomography with deconvolution-random phase modulation
由: Ge, Xin, et al.
出版: (2024)

How to use masks to prevent COVID-19
出版: (2020)

Masked autoencoders for contrastive learning of heterogenous graphs
由: Srinthi Nachiyar D/O Thangamuthu
出版: (2024)

Face masks are less effective than sunglasses in masking face identity
由: Or, Charles C.‑F., et al.
出版: (2023)

Investigating the role of Ca in NiMoCa catalyst on carbon nanotubes growth from face mask via one-pot synthesis
由: Lim, Xiu-Xian, et al.
出版: (2024)

The Khon
由: Dhanit Yupho, et al.
出版: (1954)

Optimization-free superoscillatory lens using phase and amplitude masks
由: Huang, K., et al.
出版: (2014)

Evaluation and redesign of protective masks used by male Filipino painters in Oscar Painting Company.
由: Cheng, Frederick, et al.
出版: (1999)

A robust operators’ cognitive workload recognition method based on denoising masked autoencoder
由: Yu, Xiaoqing, et al.
出版: (2024)

Some topics on refinable functions
由: TENG KEAT HUAT
出版: (2010)

Optical image encryption with a bit-plane separation method in phase-shifting digital holography
由: Chen, W., et al.
出版: (2014)

Frequency-Response masking filters basedon serial masking schemes
由: Wei, Y., et al.
出版: (2014)

Design and Analysis of a Face Mask Alternative
由: Chan, Dane Marcus A., et al.
出版: (2021)

A comparative study for mask defect tolerance on phase and transmission for dry and immersion 193-nm lithography
由: Ling, M.L., et al.
出版: (2014)

Object Substitution Masking: When Does Mask Preview Work?
由: Lim, S.W.H., et al.
出版: (2011)

When face masks signal social identity : explaining the deep face-mask divide during the COVID-19 pandemic
由: Powdthavee, Nattavudh, et al.
出版: (2021)

Saba Banana (Musa balbisiana) Peels, Smooth Cayenne Pineapple (Ananas comosus) Leaves, and Tomato (Solanum lycopersicum) Seeds as 3-Layer Eco-Friendly Face Masks
由: Lee, Irish Yi-Fung M, et al.
出版: (2023)

Appropriate levels of natural sounds to enhance soundscapes in urban areas
由: Hong, Joo Young, et al.
出版: (2025)

Social responsibility appeal and cross-lagged effects of perceived norms on mask-wearing behavior during the COVID-19 pandemic
由: Kim, Hye Kyung, et al.
出版: (2025)

Machine learning techniques and systems for mask-face detection—survey and a new OOD-mask approach
由: Hu, Youwen, et al.
出版: (2023)

Decentered ablation zones resulting from photorefractive keratectomy with an erodible mask
由: Balakrishnan, V., et al.
出版: (2011)

Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution
由: Iliescu, C., et al.
出版: (2014)

Improving robustness of deep neural networks via spectral masking for automatic speech recognition
由: Li, B., et al.
出版: (2014)

Alfentanil Co-induction for laryngeal mask insertion
由: Ang, S., et al.
出版: (2012)

An evaluation of the Laryngeal Mask Airway Supreme™ in 100 patients
由: Tan, B.H., et al.
出版: (2011)

Blurriness-guided unsharp masking
由: Ye, Wei, et al.
出版: (2019)

OPC mask simplification using over-designed timing slack of standard cells
由: Qu, Y., et al.
出版: (2014)

Integrated process of photoresist trimming and dielectric hard mask etching for sub-50 nm gate patterning
由: Bliznetsov, V., et al.
出版: (2014)

Association of face mask use with self-reported cardiovascular symptoms during the COVID-19 pandemic
由: Sheng Chew, NW, et al.
出版: (2023)