Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects

Annual Proceedings - Reliability Physics (Symposium)

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Bibliographic Details
Main Authors:	Ngwan, V.C., Zhu, C., Krishnamoorthy, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Interconnects LOW-k and Copper
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69397
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69397
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spelling	sg-nus-scholar.10635-693972015-02-20T12:18:11Z Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects Ngwan, V.C. Zhu, C. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING Interconnects LOW-k and Copper Annual Proceedings - Reliability Physics (Symposium) 571-572 ARLPB 2014-06-19T03:00:12Z 2014-06-19T03:00:12Z 2004 Conference Paper Ngwan, V.C.,Zhu, C.,Krishnamoorthy, A. (2004). Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects. Annual Proceedings - Reliability Physics (Symposium) : 571-572. ScholarBank@NUS Repository. 00999512 http://scholarbank.nus.edu.sg/handle/10635/69397 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Interconnects LOW-k and Copper
spellingShingle	Interconnects LOW-k and Copper Ngwan, V.C. Zhu, C. Krishnamoorthy, A. Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects
description	Annual Proceedings - Reliability Physics (Symposium)
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ngwan, V.C. Zhu, C. Krishnamoorthy, A.
format	Conference or Workshop Item
author	Ngwan, V.C. Zhu, C. Krishnamoorthy, A.
author_sort	Ngwan, V.C.
title	Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects
title_short	Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects
title_full	Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects
title_fullStr	Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects
title_full_unstemmed	Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects
title_sort	analysis of leakage mechanisms and leakage pathways in intra-level cu interconnects
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69397
_version_	1681087006294147072

Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects

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