Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform

Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

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Bibliographic Details
Main Authors: Lu, Y., Pang, C.K., Chen, J., Zhu, H., Yang, J.P., Mou, J.Q., Guo, G.X., Chen, B.M., Lee, T.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Comb drive
H∞ control
MEMs control
Probe storage
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69880
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Institution: National University of Singapore
id sg-nus-scholar.10635-69880
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spelling sg-nus-scholar.10635-698802015-01-07T12:36:07Z Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform Lu, Y. Pang, C.K. Chen, J. Zhu, H. Yang, J.P. Mou, J.Q. Guo, G.X. Chen, B.M. Lee, T.H. ELECTRICAL & COMPUTER ENGINEERING Comb drive H∞ control MEMs control Probe storage IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 1 19-24 2014-06-19T03:05:43Z 2014-06-19T03:05:43Z 2005 Conference Paper Lu, Y.,Pang, C.K.,Chen, J.,Zhu, H.,Yang, J.P.,Mou, J.Q.,Guo, G.X.,Chen, B.M.,Lee, T.H. (2005). Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 1 : 19-24. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/69880 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Comb drive
H∞ control
MEMs control
Probe storage
spellingShingle Comb drive
H∞ control
MEMs control
Probe storage
Lu, Y.
Pang, C.K.
Chen, J.
Zhu, H.
Yang, J.P.
Mou, J.Q.
Guo, G.X.
Chen, B.M.
Lee, T.H.
Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
description IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Lu, Y.
Pang, C.K.
Chen, J.
Zhu, H.
Yang, J.P.
Mou, J.Q.
Guo, G.X.
Chen, B.M.
Lee, T.H.
format Conference or Workshop Item
author Lu, Y.
Pang, C.K.
Chen, J.
Zhu, H.
Yang, J.P.
Mou, J.Q.
Guo, G.X.
Chen, B.M.
Lee, T.H.
author_sort Lu, Y.
title Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
title_short Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
title_full Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
title_fullStr Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
title_full_unstemmed Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
title_sort design, fabrication and control of a micro x-y stage with large ultra-thin film recoding media platform
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/69880
_version_ 1681087094688055296

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