Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform
IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Saved in:
Main Authors: | Lu, Y., Pang, C.K., Chen, J., Zhu, H., Yang, J.P., Mou, J.Q., Guo, G.X., Chen, B.M., Lee, T.H. |
---|---|
Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/69880 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
by: Zhao, T., et al.
Published: (2014) -
Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
by: Pang, C.K., et al.
Published: (2014) -
A CMOS fully-integrated low-voltage vibratory microgyroscope
by: Liang, Y.C., et al.
Published: (2014) -
A low-voltage vibratory microgyroscope with ASIC control
by: Liang, Y.C., et al.
Published: (2014) -
MOEMS variable optical attenuators using rotary comb drive actuators
by: Yeh, J.A., et al.
Published: (2014)