Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform

Design, fabrication and control of a micro X-Y stage with large ultra-thin film recoding media platform

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

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Bibliographic Details
Main Authors: Lu, Y., Pang, C.K., Chen, J., Zhu, H., Yang, J.P., Mou, J.Q., Guo, G.X., Chen, B.M., Lee, T.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Comb drive
H∞ control
MEMs control
Probe storage
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69880
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/69880

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