Device performance-based OPC for optimal circuit performance and mask cost reduction

10.1117/12.772285

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Bibliographic Details
Main Authors:	Teh, S.-H., Heng, C.-H., Tay, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Design for manufacturability (DFM) Design-process integration Device performance Mask design Non-rectangular transistor OPC
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69932
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69932
record_format	dspace
spelling	sg-nus-scholar.10635-699322023-10-30T20:35:59Z Device performance-based OPC for optimal circuit performance and mask cost reduction Teh, S.-H. Heng, C.-H. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Design for manufacturability (DFM) Design-process integration Device performance Mask design Non-rectangular transistor OPC 10.1117/12.772285 Proceedings of SPIE - The International Society for Optical Engineering 6925 - PSISD 2014-06-19T03:06:18Z 2014-06-19T03:06:18Z 2008 Conference Paper Teh, S.-H., Heng, C.-H., Tay, A. (2008). Device performance-based OPC for optimal circuit performance and mask cost reduction. Proceedings of SPIE - The International Society for Optical Engineering 6925 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.772285 9780819471109 0277786X http://scholarbank.nus.edu.sg/handle/10635/69932 000255943100032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Design for manufacturability (DFM) Design-process integration Device performance Mask design Non-rectangular transistor OPC
spellingShingle	Design for manufacturability (DFM) Design-process integration Device performance Mask design Non-rectangular transistor OPC Teh, S.-H. Heng, C.-H. Tay, A. Device performance-based OPC for optimal circuit performance and mask cost reduction
description	10.1117/12.772285
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Teh, S.-H. Heng, C.-H. Tay, A.
format	Conference or Workshop Item
author	Teh, S.-H. Heng, C.-H. Tay, A.
author_sort	Teh, S.-H.
title	Device performance-based OPC for optimal circuit performance and mask cost reduction
title_short	Device performance-based OPC for optimal circuit performance and mask cost reduction
title_full	Device performance-based OPC for optimal circuit performance and mask cost reduction
title_fullStr	Device performance-based OPC for optimal circuit performance and mask cost reduction
title_full_unstemmed	Device performance-based OPC for optimal circuit performance and mask cost reduction
title_sort	device performance-based opc for optimal circuit performance and mask cost reduction
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69932
_version_	1781783124937539584

Device performance-based OPC for optimal circuit performance and mask cost reduction

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