Device performance-based OPC for optimal circuit performance and mask cost reduction

10.1117/12.772285

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Bibliographic Details
Main Authors: Teh, S.-H., Heng, C.-H., Tay, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
OPC
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69932
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Institution: National University of Singapore

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