Evanescent wave interference lithography for surface nano-structuring
10.1088/0031-8949/2007/T129/008
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2014
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sg-nus-scholar.10635-702172023-10-29T21:26:28Z Evanescent wave interference lithography for surface nano-structuring Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Lukiyanchuk, B.S. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING 10.1088/0031-8949/2007/T129/008 Physica Scripta T T129 35-37 PHSTE 2014-06-19T03:09:35Z 2014-06-19T03:09:35Z 2007 Conference Paper Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Lukiyanchuk, B.S. (2007). Evanescent wave interference lithography for surface nano-structuring. Physica Scripta T T129 : 35-37. ScholarBank@NUS Repository. https://doi.org/10.1088/0031-8949/2007/T129/008 02811847 http://scholarbank.nus.edu.sg/handle/10635/70217 000254342700009 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1088/0031-8949/2007/T129/008 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Lukiyanchuk, B.S. |
| format |
Conference or Workshop Item |
| author |
Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Lukiyanchuk, B.S. |
| spellingShingle |
Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Lukiyanchuk, B.S. Evanescent wave interference lithography for surface nano-structuring |
| author_sort |
Zhou, Y. |
| title |
Evanescent wave interference lithography for surface nano-structuring |
| title_short |
Evanescent wave interference lithography for surface nano-structuring |
| title_full |
Evanescent wave interference lithography for surface nano-structuring |
| title_fullStr |
Evanescent wave interference lithography for surface nano-structuring |
| title_full_unstemmed |
Evanescent wave interference lithography for surface nano-structuring |
| title_sort |
evanescent wave interference lithography for surface nano-structuring |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70217 |
| _version_ |
1781783145474949120 |