Evanescent wave interference lithography for surface nano-structuring

10.1088/0031-8949/2007/T129/008

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Bibliographic Details
Main Authors: Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Lukiyanchuk, B.S.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70217
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Institution: National University of Singapore