Evanescent wave interference lithography for surface nano-structuring
10.1088/0031-8949/2007/T129/008
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Main Authors: | Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Lukiyanchuk, B.S. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/70217 |
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Institution: | National University of Singapore |
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